Double acting high pressure pump is a cleaning equipment for wet degumming in semiconductor production equipment. This equipment is a degumming cleaning equipment developed by Altron Technology according to the needs of semiconductor production process, and the double acting pump is the core equipment of wet degumming cleaning equipment. In the degumming process of semiconductor wet process, special cleaning liquid is needed to spray semiconductor products. The shape of the spray jet is linear, needle, fan, etc., and the jet rotates or moves XY axis by NC drive to achieve the purpose of semiconductor degumming cleaning.

The sealing of the double-acting high-pressure pump is made of  FKM or  FFKM, and the cleaning medium is suitable for  NMP/  DMSO/EKC/TMAH/alcohol-ammonia liquids, etc.

Equipment technical parameters:

Compressed air driving pressure: 0.05-0.9Mpa

Cleaning pressure: 0~30 Mpa

Cleaning fluid flow: 0~4 L/min

The number of double-acting pumps in a single device: 2-4 sets